Analysis by Coupled-Mode Theory of X-ray Multilayer Gratings
Laboratoire de Chimie Physique–Matière et Rayonnement, Université Pierre et Marie Curie, CNRS UMR 7614, 11 rue Pierre et Marie Curie, 75231 Paris Cedex 05, France
Multilayer gratings developed since the end of the ninethies are now used for various purposes in x-uv optics: polychromator, narrow bandpass monochromators…We have implemented the Coupled-Mode Theory (CMT) to calculate the performances of these devices (efficiencies, bandwidths…) especially for quasi-lamellar gratings with different shapes of the multilayer pitch. We have fabricated such gratings and compared CMT calculations with measurements obtained at the BEAR beamline of ELETTRA.
© Owned by the authors, published by EDP Sciences, 2013
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