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Fabrication of microcraters on silicon substrate by UV nanosecond photonic nanojets from microspheres

K.L.N. Deepak, D. Grojo, L. Charmasson, P. Delaporte, O. Utéza, M. Dussauze and E. Fargin

Published online: 9 avril 2013

DOI: 10.1051/uvx/201302003

K.L.N. Deepak

D. Grojo

L. Charmasson

P. Delaporte

O. Utéza

M. Dussauze

E. Fargin

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